Scanning Probe Nanolithography Methods

Authors

  • M. Urbánek Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno
  • S. Krátký Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno
  • M. Matějka Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno
  • V. Kolařík Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno
  • M. Horáček Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno

Keywords:

scanning probe writing, local anodic oxidation, tip engraving, atomic force microscopy

Abstract

AFM (atomic force microscopy) nanolithography can be used for preparation of nanostructures in various fields such as nanodevices, nanoantenas and biosensors. Several methods of AFM nanolithography (local anodic oxidation, electron resist exposure, dip pen nanolithography and nanoscratching), their advantages and essential properties are described.

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Published

2014-10-15

How to Cite

Urbánek, M., Krátký, S., Matějka, M., Kolařík, V., & Horáček, M. (2014). Scanning Probe Nanolithography Methods. Chemické Listy, 108(10), 937–941. Retrieved from http://chemicke-listy.cz/ojs3/index.php/chemicke-listy/article/view/447

Issue

Vol. 108 No. 10 (2014)

Section

Articles

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