Scanning Probe Nanolithography Methods

Page: 937

M. Urbánek, S. Krátký, M. Matějka, V. Kolařík, and M. Horáček

Institute of Scientific Instruments, Aca¬demy of Sciences of the Czech Republic, Brno

 

AFM (atomic force microscopy) nanolithography can be used for preparation of nanostructures in various fields such as nanodevices, nanoantenas and biosensors. Several methods of AFM nanolithography (local anodic oxidation, electron resist exposure, dip pen nanolithography and nanoscratching), their advantages and essential properties are described.

 

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