Deposition of thin films in atmospheric pressure homogenous discharge in N2 + HMDSO + O2 atmosphere

Page: s1519

F. Studnička, D. Trunec, P. Sťahel, V. Buršíková, L. Kelar

2nd Central European Symposium on Plasma Chemistry, 31st August - 4th September 2008 Brno, Czech Republic

 

 

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