Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Page: s1478

L. Kelar, V. Buršíková, P. Sťahel, Z. Bochníček, V. Peřina, J. Buršík

2nd Central European Symposium on Plasma Chemistry, 31st August - 4th September 2008 Brno, Czech Republic

 

 

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